Toggle navigation
My submissions
Login
Toggle navigation
View item
imec Publications Repository
imec Publications
Articles
View item
imec Publications Repository
imec Publications
Articles
View item
JavaScript is disabled for your browser. Some features of this site may not work without it.
In situ observation by RBS of oxygen gettering during Cs sputtering of Si-based materials
View/
open
1134.pdf (316.6Kb)
Metadata
Show full item record
Authors
De Coster, Walter
;
Brijs, Bert
;
Deleu, Jeroen
;
Alay, Josep Lluis
;
Vandervorst, Wilfried
Journal
Nuclear Instruments and Methods in Physics Research B
Volume
118
Title
In situ observation by RBS of oxygen gettering during Cs sputtering of Si-based materials
Publication type
Journal article
Embargo date
9999-12-31
Collections
Articles
Search imec Publications Repository
This collection
Browse
All of imec Publications Repository
Collections
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
This collection
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
My account
login