In situ observation by RBS of oxygen gettering during Cs sputtering of Si-based materials

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Authors
De Coster, Walter; Brijs, Bert; Deleu, Jeroen; Alay, Josep Lluis; Vandervorst, Wilfried
Journal
Nuclear Instruments and Methods in Physics Research B
Volume
118
Title
In situ observation by RBS of oxygen gettering during Cs sputtering of Si-based materials
Publication type
Journal article
Embargo date
9999-12-31
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