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In situ observation by RBS of oxygen gettering during Cs sputtering of Si-based materials
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In situ observation by RBS of oxygen gettering during Cs sputtering of Si-based materials
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Date
1996
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Coster, Walter
;
Brijs, Bert
;
Deleu, Jeroen
;
Alay, Josep Lluis
;
Vandervorst, Wilfried
Journal
Nuclear Instruments and Methods in Physics Research B
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2028
since deposited on 2021-09-29
Acq. date: 2025-12-11
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Views
2028
since deposited on 2021-09-29
Acq. date: 2025-12-11
Citations