Publication:
In situ observation by RBS of oxygen gettering during Cs sputtering of Si-based materials
Date
| dc.contributor.author | De Coster, Walter | |
| dc.contributor.author | Brijs, Bert | |
| dc.contributor.author | Deleu, Jeroen | |
| dc.contributor.author | Alay, Josep Lluis | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-09-29T14:22:09Z | |
| dc.date.available | 2021-09-29T14:22:09Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 1996 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/1157 | |
| dc.source.beginpage | 82 | |
| dc.source.endpage | 87 | |
| dc.source.journal | Nuclear Instruments and Methods in Physics Research B | |
| dc.source.volume | 118 | |
| dc.title | In situ observation by RBS of oxygen gettering during Cs sputtering of Si-based materials | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | Original bundle
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| Publication available in collections: |