Electrical characterization of SrBi2Ta2O2O9(SBT)/high-k gate stack in metal-ferroelectric-insulator-semiconductor structure
dc.contributor.author | Xu, Zhen | |
dc.date.accessioned | 2021-10-16T07:17:43Z | |
dc.date.available | 2021-10-16T07:17:43Z | |
dc.date.issued | 2005-09 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11580 | |
dc.source | IIOimport | |
dc.title | Electrical characterization of SrBi2Ta2O2O9(SBT)/high-k gate stack in metal-ferroelectric-insulator-semiconductor structure | |
dc.type | PHD thesis | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.contributor.thesisadvisor | Groeseneken, Guido | |
dc.contributor.thesisadvisor | Maes, Herman | |
imec.availability | Published - open access |