Show simple item record

Demonstration of Ni fully GermanoSilicide as a pFET gate electrode candidate on HfSiON

dc.contributor.authorYu, HongYu
dc.contributor.authorSinganamalla, Raghunath
dc.contributor.authorOpsomer, Karl
dc.contributor.authorAugendre, Emmanuel
dc.contributor.authorSimoen, Eddy
dc.contributor.authorKittl, Jorge
dc.contributor.authorKubicek, Stefan
dc.contributor.authorSeveri, Simone
dc.contributor.authorShi, Xiaoping
dc.contributor.authorBrus, Stephan
dc.contributor.authorZhao, Chao
dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.authorLocorotondo, Sabrina
dc.contributor.authorShamiryan, Denis
dc.contributor.authorVan Dal, Mark
dc.contributor.authorVeloso, Anabela
dc.contributor.authorLauwers, Anne
dc.contributor.authorNiwa, Masaaki
dc.contributor.authorMaex, Karen
dc.contributor.authorDe Meyer, Kristin
dc.contributor.authorAbsil, Philippe
dc.contributor.authorJurczak, Gosia
dc.contributor.authorBiesemans, Serge
dc.date.accessioned2021-10-16T07:24:58Z
dc.date.available2021-10-16T07:24:58Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11598
dc.sourceIIOimport
dc.titleDemonstration of Ni fully GermanoSilicide as a pFET gate electrode candidate on HfSiON
dc.typeProceedings paper
dc.contributor.imecauthorOpsomer, Karl
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorKubicek, Stefan
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorBrus, Stephan
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.contributor.imecauthorLocorotondo, Sabrina
dc.contributor.imecauthorVan Dal, Mark
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.imecauthorLauwers, Anne
dc.contributor.imecauthorMaex, Karen
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.imecauthorAbsil, Philippe
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorBiesemans, Serge
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.source.peerreviewyes
dc.source.beginpage27/05/2001
dc.source.endpage27/05/2004
dc.source.conferenceTechnical Digest International Electron Devices Meeting (IEDM)
dc.source.conferencedate5/12/2005
dc.source.conferencelocationWashington, D.C. USA
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record