dc.contributor.author | De Gendt, Stefan | |
dc.contributor.author | Kenis, Karine | |
dc.contributor.author | Mertens, Paul | |
dc.contributor.author | Heyns, Marc | |
dc.contributor.author | Claes, M. | |
dc.contributor.author | Van Grieken, R. E. | |
dc.contributor.author | Bailleul, A. | |
dc.contributor.author | Knotter, Martin | |
dc.contributor.author | De Bokx, P. K. | |
dc.date.accessioned | 2021-09-29T14:22:22Z | |
dc.date.available | 2021-09-29T14:22:22Z | |
dc.date.issued | 1996 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/1159 | |
dc.source | IIOimport | |
dc.title | Use of grazing emission XRF for silicon wafer surface contamination measurements | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.imecauthor | Kenis, Karine | |
dc.contributor.imecauthor | Mertens, Paul | |
dc.contributor.imecauthor | Heyns, Marc | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 57 | |
dc.source.endpage | 60 | |
dc.source.conference | Proceedings of the 3rd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS | |
dc.source.conferencedate | 23/09/1996 | |
dc.source.conferencelocation | Antwerpen Belgium | |
imec.availability | Published - open access | |