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Conference contributions
Impurity determination in narrow copper lines
Publication:
Impurity determination in narrow copper lines
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Date
2005-01
Proceedings Paper
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9626.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Zhang, Wenqi
;
Brongersma, Sywert
;
Conard, Thierry
;
Vandervorst, Wilfried
;
Maex, Karen
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1802
since deposited on 2021-10-16
Acq. date: 2026-01-08
Citations
Metrics
Views
1802
since deposited on 2021-10-16
Acq. date: 2026-01-08
Citations