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Interconnect for out-of-plane MEMS

dc.contributor.authorAarts, Arno
dc.contributor.authorPereira Neves, Hercules
dc.contributor.authorPuers, Bob
dc.contributor.authorVan Hoof, Chris
dc.date.accessioned2021-10-16T14:59:59Z
dc.date.available2021-10-16T14:59:59Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11616
dc.sourceIIOimport
dc.titleInterconnect for out-of-plane MEMS
dc.typeMeeting abstract
dc.contributor.imecauthorAarts, Arno
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorVan Hoof, Chris
dc.source.peerreviewyes
dc.source.conference18th Workshop on Micromachining, Micromechanics and Microsystems - MME
dc.source.conferencedate16/09/2007
dc.source.conferencelocationGuimaraes Portugal
imec.availabilityPublished - imec


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