Postdeposition-anneal effect on negative bias temperature instability in HfSiON gate stacks

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Authors

Aoulaiche, Marc; Houssa, Michel; Conard, Thierry; De Gendt, Stefan; Groeseneken, Guido; Maes, Herman; Heyns, Marc

Issue

1

Journal

IEEE Trans. Device and Materials Reliability

Volume

7

Title

Postdeposition-anneal effect on negative bias temperature instability in HfSiON gate stacks

Publication type

Journal article

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