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Defectivity study during oxide CMP with composite polymer core – silica shell abrasives: the effect of the silica particle shape
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1882 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-12
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Metrics
Views
1882 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-12
Citations