Plasma damage of low dielectric constant materials
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.date.accessioned | 2021-10-16T15:01:53Z | |
| dc.date.available | 2021-10-16T15:01:53Z | |
| dc.date.issued | 2007 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11681 | |
| dc.source | IIOimport | |
| dc.title | Plasma damage of low dielectric constant materials | |
| dc.type | Proceedings paper | |
| dc.source.peerreview | no | |
| dc.source.conference | 8th International Seminar on Porous Glasses - Special Glasses | |
| dc.source.conferencedate | 4/09/2007 | |
| dc.source.conferencelocation | Wroclaw Poland | |
| imec.availability | Published - imec |
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