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Low dielectric constant materials for advanced microelectronics

dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-16T15:01:55Z
dc.date.available2021-10-16T15:01:55Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11682
dc.sourceIIOimport
dc.titleLow dielectric constant materials for advanced microelectronics
dc.typeProceedings paper
dc.source.peerreviewno
dc.source.beginpage10
dc.source.endpage10
dc.source.conferenceInternational Conference on Micro- and Nanoelectronics
dc.source.conferencedate1/10/2007
dc.source.conferencelocationMoscow Russia
imec.availabilityPublished - imec


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