Finite element analysis of thermo-elastic modal damping of MEMS vibrations

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Authors

Barauskas, R.; Kausinis, S.; De Wolf, Ingrid; Stoffels, Steve; Tilmans, Harrie

Issue

2

Journal

Journal of Vibroengineering

Volume

9

Title

Finite element analysis of thermo-elastic modal damping of MEMS vibrations

Publication type

Journal article

Embargo date

9999-12-31

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