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Finite element analysis of thermo-elastic modal damping of MEMS vibrations

dc.contributor.authorBarauskas, R.
dc.contributor.authorKausinis, S.
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorStoffels, Steve
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-16T15:02:19Z
dc.date.available2021-10-16T15:02:19Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11691
dc.sourceIIOimport
dc.titleFinite element analysis of thermo-elastic modal damping of MEMS vibrations
dc.typeJournal article
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorStoffels, Steve
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage21
dc.source.endpage33
dc.source.journalJournal of Vibroengineering
dc.source.issue2
dc.source.volume9
imec.availabilityPublished - open access


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