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Impact and detection of nanoparticles by leakage current measurements

dc.contributor.authorBearda, Twan
dc.contributor.authorKim, Kyun-Hyun
dc.contributor.authorWali, Faisal
dc.date.accessioned2021-10-16T15:03:09Z
dc.date.available2021-10-16T15:03:09Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11705
dc.sourceIIOimport
dc.titleImpact and detection of nanoparticles by leakage current measurements
dc.typeProceedings paper
dc.source.peerreviewyes
dc.source.conferenceSEMATECH Surface Preparation and Cleaning Conference
dc.source.conferencedate25/04/2007
dc.source.conferencelocationAustin, TX USA
imec.availabilityPublished - imec


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