Micro-Raman spectroscopy to study local mechanical stress in silicon integrated circuits

dc.contributor.author	De Wolf, Ingrid
dc.date.accessioned	2021-09-29T14:23:37Z
dc.date.available	2021-09-29T14:23:37Z
dc.date.issued	1996
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/1172
dc.source	IIOimport
dc.title	Micro-Raman spectroscopy to study local mechanical stress in silicon integrated circuits
dc.type	Journal article
dc.contributor.imecauthor	De Wolf, Ingrid
dc.date.embargo	9999-12-31
dc.source.peerreview	no
dc.source.beginpage	139
dc.source.endpage	154
dc.source.journal	Semiconductor Science and Technology
dc.source.issue	2
dc.source.volume	11
imec.availability	Published - open access