Publication:

Micro-Raman spectroscopy to study local mechanical stress in silicon integrated circuits

Date

Loading...
Thumbnail Image

Journal

Abstract

Description

Metrics

Downloads

1 since deposited on 2021-09-29
Acq. date: 2026-01-11

Views

1992 since deposited on 2021-09-29
3last month
2last week
Acq. date: 2026-01-11

Citations

Metrics

Downloads

1 since deposited on 2021-09-29
Acq. date: 2026-01-11

Views

1992 since deposited on 2021-09-29
3last month
2last week
Acq. date: 2026-01-11

Citations