Publication:
Micro-Raman spectroscopy to study local mechanical stress in silicon integrated circuits
Date
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.date.accessioned | 2021-09-29T14:23:37Z | |
| dc.date.available | 2021-09-29T14:23:37Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 1996 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/1172 | |
| dc.source.beginpage | 139 | |
| dc.source.endpage | 154 | |
| dc.source.issue | 2 | |
| dc.source.journal | Semiconductor Science and Technology | |
| dc.source.volume | 11 | |
| dc.title | Micro-Raman spectroscopy to study local mechanical stress in silicon integrated circuits | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |