A platform for silicon-on-insulator nanophotonics on industrial CMOS tools

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Authors
Bogaerts, Wim; Dumon, Pieter; Fedeli, J.M.; Tchelnokov, A.; Van Thourhout, Dries; Selvaraja, Shankar; Baets, Roel
Conference
PECS-VII: International Symposium on Photonic and Electromagnetic Crystal Structures
Title
A platform for silicon-on-insulator nanophotonics on industrial CMOS tools
Publication type
Oral presentation
Embargo date
9999-12-31
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