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Advances in optical carrier profiling through high-frequency modulated optical reflectance

dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorDortu, Fabian
dc.contributor.authorClarysse, Trudo
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorShaughnessy, Derrick
dc.contributor.authorSalnick, Alex
dc.contributor.authorNicolaides, Lena
dc.contributor.authorOpsal, Jon
dc.date.accessioned2021-10-16T15:07:41Z
dc.date.available2021-10-16T15:07:41Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11769
dc.sourceIIOimport
dc.titleAdvances in optical carrier profiling through high-frequency modulated optical reflectance
dc.typeProceedings paper
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.source.peerreviewno
dc.source.beginpage71
dc.source.endpage81
dc.source.conferenceInternational Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology, and Modeling
dc.source.conferencedate6/05/2007
dc.source.conferencelocationNapa, CA USA
imec.availabilityPublished - imec


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