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Effect of Al203 morphology on the erase saturation performance in SANOS-type memory cells

dc.contributor.authorCacciato, Antonio
dc.contributor.authorFurnemont, Arnaud
dc.contributor.authorBreuil, Laurent
dc.contributor.authorDe Vos, Joeri
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorVan Houdt, Jan
dc.date.accessioned2021-10-16T15:13:08Z
dc.date.available2021-10-16T15:13:08Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11825
dc.sourceIIOimport
dc.titleEffect of Al203 morphology on the erase saturation performance in SANOS-type memory cells
dc.typeProceedings paper
dc.contributor.imecauthorFurnemont, Arnaud
dc.contributor.imecauthorBreuil, Laurent
dc.contributor.imecauthorDe Vos, Joeri
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.orcidimecFurnemont, Arnaud::0000-0002-6378-1030
dc.contributor.orcidimecBreuil, Laurent::0000-0003-2869-1651
dc.contributor.orcidimecDe Vos, Joeri::0000-0002-9332-9336
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.source.peerreviewno
dc.source.beginpage217
dc.source.endpage220
dc.source.conferenceProceedings 2nd International Conference on Memory Technology and Design - ICMTD
dc.source.conferencedate7/05/2007
dc.source.conferencelocationGiens France
imec.availabilityPublished - imec


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