Study of Ni-Silicide contacts to Si:C source/drain

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Authors

Cho, Moon Ju; Nouri, F.; Schreutelkamp, Rob; Kim, Y.; Mertens, Sofie; Verheyen, Peter; Steenbergen, Johnny; Vrancken, Christa; Richard, Olivier; Tokei, Zsolt; Lauwers, Anne; Bender, Hugo; Van Daele, Benny; Vandervorst, Wilfried; Geenen, Luc; Absil, Philippe; Kubicek, Stefan; Demeurisse, Caroline

Issue

34

Journal

Semiconductor Fabtech

Title

Study of Ni-Silicide contacts to Si:C source/drain

Publication type

Journal article

Embargo date

9999-12-31

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