Study of Ni-Silicide contacts to Si:C source/drain

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Author(s)

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Schreutelkamp, Rob

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Verheyen, Peter

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Steenbergen, Johnny

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Vrancken, Christa

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Richard, Olivier

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Van Daele, Benny

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Vandervorst, Wilfried

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Absil, Philippe

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Kubicek, Stefan

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Demeurisse, Caroline

Journal

Semiconductor Fabtech

Metrics

1991 since deposited on 2021-10-16

Acq. date: 2025-10-24