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Material issues of SiGe and Ge CMOS technologies

dc.contributor.authorClaeys, Cor
dc.contributor.authorLoo, Roger
dc.contributor.authorMeuris, Marc
dc.contributor.authorSimoen, Eddy
dc.date.accessioned2021-10-16T15:19:40Z
dc.date.available2021-10-16T15:19:40Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11876
dc.sourceIIOimport
dc.titleMaterial issues of SiGe and Ge CMOS technologies
dc.typeOral presentation
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.source.peerreviewno
dc.source.conference17th International Vacuum Congrss - IVC-17
dc.source.conferencedate2/07/2007
dc.source.conferencelocationStockholm Sweden
imec.availabilityPublished - imec


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