Grown-in and process-induced defect control in advanced Ge technologies
dc.contributor.author | Claeys, Cor | |
dc.contributor.author | Simoen, Eddy | |
dc.date.accessioned | 2021-10-16T15:19:47Z | |
dc.date.available | 2021-10-16T15:19:47Z | |
dc.date.issued | 2007 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11877 | |
dc.source | IIOimport | |
dc.title | Grown-in and process-induced defect control in advanced Ge technologies | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Simoen, Eddy | |
dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
dc.source.peerreview | no | |
dc.source.conference | WINNACT-12 Colloquium | |
dc.source.conferencedate | 6/06/2007 | |
dc.source.conferencelocation | Kumming China | |
imec.availability | Published - imec |
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