Show simple item record

Does strain engineering impact the gate stack quality and reliability?

dc.contributor.authorClaeys, Cor
dc.contributor.authorSimoen, Eddy
dc.contributor.authorGiusi, G.
dc.contributor.authorCrupi, F.
dc.date.accessioned2021-10-16T15:20:10Z
dc.date.available2021-10-16T15:20:10Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11880
dc.sourceIIOimport
dc.titleDoes strain engineering impact the gate stack quality and reliability?
dc.typeProceedings paper
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage101
dc.source.endpage114
dc.source.conferenceULSI Process Integration 5
dc.source.conferencedate7/10/2007
dc.source.conferencelocationWashington, DC USA
imec.availabilityPublished - open access
imec.internalnotesECS Trans.; Vol. 11, issue 6


Files in this item

Thumbnail
Name:
15906.pdf
Size:
369.0Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record