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Insights in junction photo-voltage based sheet resistance measurements for advanced CMOS

dc.contributor.authorClarysse, Trudo
dc.contributor.authorMoussa, Alain
dc.contributor.authorSchaus, Frederic
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorFaifer, Vladimir
dc.contributor.authorCurrent, Michael
dc.date.accessioned2021-10-16T15:20:51Z
dc.date.available2021-10-16T15:20:51Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11885
dc.sourceIIOimport
dc.titleInsights in junction photo-voltage based sheet resistance measurements for advanced CMOS
dc.typeProceedings paper
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.conferenceInternational Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling
dc.source.conferencedate6/05/2007
dc.source.conferencelocationNapa, CA USA
imec.availabilityPublished - imec


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