Multi-gate devices for the 32nm technology node and beyond

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Authors
Collaert, Nadine; De Keersgieter, An; Dixit, Abhisek; Ferain, Isabelle; Lai, Li-Shyue; Lenoble, Damien; Mercha, Abdelkarim; Nackaerts, Axel; Pawlak, Bartek; Rooyackers, Rita; Schulz, Thomas; San, Kemal Tamer; Son, Nak Jin; Van Dal, Mark; Verheyen, Peter; von Arnim, Klaus; Witters, Liesbeth; De Meyer, Kristin; Biesemans, Serge; Jurczak, Gosia
Conference
Proceedings of the 37th European Solid-State Device Research Conference - ESSDERC
Title
Multi-gate devices for the 32nm technology node and beyond
Publication type
Proceedings paper
Embargo date
9999-12-31
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