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Experimental evidence of non-uniform dielectric charging in capacitive RF-MEMS switches

dc.contributor.authorCzarnecki, Piotr
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorSoussan, Philippe
dc.contributor.authorNolmans, Philip
dc.contributor.authorEkkels, Phillip
dc.contributor.authorMuller, Philippe
dc.contributor.authorTilmans, Harrie
dc.contributor.authorDe Raedt, Walter
dc.contributor.authorPuers, Bob
dc.contributor.authorMarchand, Laurent
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-16T15:27:39Z
dc.date.available2021-10-16T15:27:39Z
dc.date.issued2007-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11933
dc.sourceIIOimport
dc.titleExperimental evidence of non-uniform dielectric charging in capacitive RF-MEMS switches
dc.typeProceedings paper
dc.contributor.imecauthorCzarnecki, Piotr
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorSoussan, Philippe
dc.contributor.imecauthorNolmans, Philip
dc.contributor.imecauthorMuller, Philippe
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecSoussan, Philippe::0000-0002-1347-6978
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.beginpage227
dc.source.endpage230
dc.source.conference18th Workshop on MicroMechanics Europe
dc.source.conferencedate16/09/2007
dc.source.conferencelocationGuimaraes Portugal
imec.availabilityPublished - imec


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