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The effect of the substrate temperature on extended defects created by hydrogen implantation in germanium
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Authors
David, M.L.
;
Pailloux, F.
;
Babonneau, D.
;
Drouet, M.
;
Barbot, J.F.
;
Simoen, Eddy
;
Claeys, Cor
Issue
9
Journal
Journal of Applied Physics
Volume
102
Title
The effect of the substrate temperature on extended defects created by hydrogen implantation in germanium
Publication type
Journal article
Embargo date
9999-12-31
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