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The effect of the substrate temperature on extended defects created by hydrogen implantation in germanium

dc.contributor.authorDavid, M.L.
dc.contributor.authorPailloux, F.
dc.contributor.authorBabonneau, D.
dc.contributor.authorDrouet, M.
dc.contributor.authorBarbot, J.F.
dc.contributor.authorSimoen, Eddy
dc.contributor.authorClaeys, Cor
dc.date.accessioned2021-10-16T15:28:27Z
dc.date.available2021-10-16T15:28:27Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11938
dc.sourceIIOimport
dc.titleThe effect of the substrate temperature on extended defects created by hydrogen implantation in germanium
dc.typeJournal article
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage96101
dc.source.journalJournal of Applied Physics
dc.source.issue9
dc.source.volume102
imec.availabilityPublished - open access


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