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Defects created by plasma immersion ion implantation of hydrogen in germanium

dc.contributor.authorDavid, M.L.
dc.contributor.authorPailloux, F.
dc.contributor.authorDrouet, M.
dc.contributor.authorBeaufort, M.F.
dc.contributor.authorBarbot, J.F.
dc.contributor.authorSimoen, Eddy
dc.contributor.authorClaeys, Cor
dc.date.accessioned2021-10-16T15:28:35Z
dc.date.available2021-10-16T15:28:35Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11939
dc.sourceIIOimport
dc.titleDefects created by plasma immersion ion implantation of hydrogen in germanium
dc.typeOral presentation
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.source.peerreviewno
dc.source.conferenceMRS Spring Meeting Symposium F: Semiconductor Defect Engineering - Materials, Synthesis, Structures and Devices II
dc.source.conferencedate9/04/2007
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec


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