dc.contributor.author | David, M.L. | |
dc.contributor.author | Pailloux, F. | |
dc.contributor.author | Drouet, M. | |
dc.contributor.author | Beaufort, M.F. | |
dc.contributor.author | Barbot, J.F. | |
dc.contributor.author | Simoen, Eddy | |
dc.contributor.author | Claeys, Cor | |
dc.date.accessioned | 2021-10-16T15:28:35Z | |
dc.date.available | 2021-10-16T15:28:35Z | |
dc.date.issued | 2007 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11939 | |
dc.source | IIOimport | |
dc.title | Defects created by plasma immersion ion implantation of hydrogen in germanium | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Simoen, Eddy | |
dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
dc.source.peerreview | no | |
dc.source.conference | MRS Spring Meeting Symposium F: Semiconductor Defect Engineering - Materials, Synthesis, Structures and Devices II | |
dc.source.conferencedate | 9/04/2007 | |
dc.source.conferencelocation | San Francisco, CA USA | |
imec.availability | Published - imec | |