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Optical techniques in MEMS reliability

dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-16T15:30:14Z
dc.date.available2021-10-16T15:30:14Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11950
dc.sourceIIOimport
dc.titleOptical techniques in MEMS reliability
dc.typeOral presentation
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.conference7th MEMUNITY workshop
dc.source.conferencedate23/10/2007
dc.source.conferencelocationEindhoven the Netherlands
dc.identifier.urlwww.memunity.org
imec.availabilityPublished - imec


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