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Ge deep sub-micron HiK/MG pFET with superior drive compared to Si HiK/MG state-of-the-art reference

dc.contributor.authorDe Jaeger, Brice
dc.contributor.authorKaczer, Ben
dc.contributor.authorZimmerman, Paul
dc.contributor.authorOpsomer, Karl
dc.contributor.authorWinderickx, Gillis
dc.contributor.authorVan Steenbergen, Jan
dc.contributor.authorVan Moorhem, Els
dc.contributor.authorTerzieva, Valentina
dc.contributor.authorBonzom, Renaud
dc.contributor.authorLeys, Frederik
dc.contributor.authorArena, Chantal
dc.contributor.authorBauer, Matthias
dc.contributor.authorWerkhoven, Chris
dc.contributor.authorCaymax, Matty
dc.contributor.authorMeuris, Marc
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-16T15:30:46Z
dc.date.available2021-10-16T15:30:46Z
dc.date.issued2007-01
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11953
dc.sourceIIOimport
dc.titleGe deep sub-micron HiK/MG pFET with superior drive compared to Si HiK/MG state-of-the-art reference
dc.typeJournal article
dc.contributor.imecauthorDe Jaeger, Brice
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorOpsomer, Karl
dc.contributor.imecauthorWinderickx, Gillis
dc.contributor.imecauthorVan Steenbergen, Jan
dc.contributor.imecauthorVan Moorhem, Els
dc.contributor.imecauthorTerzieva, Valentina
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecDe Jaeger, Brice::0000-0001-8804-7556
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.source.peerreviewno
dc.source.beginpageS221
dc.source.endpageS226
dc.source.journalSemiconductor Science and Technology
dc.source.issue1
dc.source.volume22
imec.availabilityPublished - imec
imec.internalnotesAbstract has also been published in the proceedings of the ISTDM'06


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