Ge deep sub-micron HiK/MG pFET with superior drive compared to Si HiK/MG state-of-the-art reference

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Author(s)

De Jaeger, Brice

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Zimmerman, Paul

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Winderickx, Gillis

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Van Steenbergen, Jan

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Van Moorhem, Els

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Terzieva, Valentina

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Bauer, Matthias

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Werkhoven, Chris

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Journal

Semiconductor Science and Technology

Metrics

1970 since deposited on 2021-10-16

Acq. date: 2025-10-23