Publication:

Ge deep sub-micron HiK/MG pFET with superior drive compared to Si HiK/MG state-of-the-art reference

Date

2007-01
Journal article
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dc.contributor.authorDe Jaeger, Brice
dc.contributor.authorKaczer, Ben
dc.contributor.authorZimmerman, Paul
dc.contributor.authorOpsomer, Karl
dc.contributor.authorWinderickx, Gillis
dc.contributor.authorVan Steenbergen, Jan
dc.contributor.authorVan Moorhem, Els
dc.contributor.authorTerzieva, Valentina
dc.contributor.authorBonzom, Renaud
dc.contributor.authorLeys, Frederik
dc.contributor.authorArena, Chantal
dc.contributor.authorBauer, Matthias
dc.contributor.authorWerkhoven, Chris
dc.contributor.authorCaymax, Matty
dc.contributor.authorMeuris, Marc
dc.contributor.authorHeyns, Marc
dc.contributor.imecauthorDe Jaeger, Brice
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorOpsomer, Karl
dc.contributor.imecauthorWinderickx, Gillis
dc.contributor.imecauthorVan Steenbergen, Jan
dc.contributor.imecauthorVan Moorhem, Els
dc.contributor.imecauthorTerzieva, Valentina
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecDe Jaeger, Brice::0000-0001-8804-7556
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.accessioned2021-10-16T15:30:46Z
dc.date.available2021-10-16T15:30:46Z
dc.date.issued2007-01
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11953
dc.source.beginpageS221
dc.source.endpageS226
dc.source.issue1
dc.source.journalSemiconductor Science and Technology
dc.source.volume22
dc.title

Ge deep sub-micron HiK/MG pFET with superior drive compared to Si HiK/MG state-of-the-art reference

dc.typeJournal article
dspace.entity.typePublication
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