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Impact of ceria properties and CMP parameters on STI CMP performance

dc.contributor.authorDe Messemaeker, Jo
dc.contributor.authorSinapi, Fabrice
dc.contributor.authorOng, Patrick
dc.contributor.authorPut, Stijn
dc.contributor.authorNelis, Daniel
dc.contributor.authorVan den bosch, Jeroen
dc.contributor.authorStrauven, Yvan
dc.contributor.authorLippens, Paul
dc.contributor.authorDevriendt, Katia
dc.date.accessioned2021-10-16T15:31:36Z
dc.date.available2021-10-16T15:31:36Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11958
dc.sourceIIOimport
dc.titleImpact of ceria properties and CMP parameters on STI CMP performance
dc.typeProceedings paper
dc.contributor.imecauthorOng, Patrick
dc.contributor.imecauthorVan den bosch, Jeroen
dc.contributor.imecauthorDevriendt, Katia
dc.contributor.orcidimecOng, Patrick::0000-0002-2072-292X
dc.contributor.orcidimecDevriendt, Katia::0000-0002-0662-7926
dc.source.peerreviewyes
dc.source.conferenceLake Placid CMP Meeting
dc.source.conferencedate13/08/2007
dc.source.conferencelocationLake Placid, NY USA
dc.identifier.urlhttp://www.nanograin.umicore.com/show_LakePlacid2007.pdf
imec.availabilityPublished - imec


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