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Integrated nanomechanical motion detection by means of optical evanescent wave coupling

dc.contributor.authorDe Vlaminck, Iwijn
dc.contributor.authorRoels, Joris
dc.contributor.authorTaillaert, Dirk
dc.contributor.authorVan Thourhout, Dries
dc.contributor.authorLagae, Liesbet
dc.contributor.authorBaets, Roel
dc.contributor.authorBorghs, Gustaaf
dc.date.accessioned2021-10-16T15:36:33Z
dc.date.available2021-10-16T15:36:33Z
dc.date.issued2007-02
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11989
dc.sourceIIOimport
dc.titleIntegrated nanomechanical motion detection by means of optical evanescent wave coupling
dc.typeProceedings paper
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.imecauthorLagae, Liesbet
dc.contributor.imecauthorBaets, Roel
dc.contributor.imecauthorBorghs, Gustaaf
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage64640E
dc.source.conferenceMEMS/MOEMS Components and Their Applications IV
dc.source.conferencedate20/01/2007
dc.source.conferencelocationSan Jose, CA USA
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 6464


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