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Functional and reliability testing of MEMS: instrumentation and methodology

dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-16T15:38:43Z
dc.date.available2021-10-16T15:38:43Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12003
dc.sourceIIOimport
dc.titleFunctional and reliability testing of MEMS: instrumentation and methodology
dc.typeOral presentation
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.conferenceAdvanced Packaging WEBCAST
dc.source.conferencedate30/11/2007
dc.source.conferencelocation
dc.identifier.urlhttp://livestudio.talkpoint.com/livestudio/guest_default.asp?PresentationGUID=AD5C2E25-2F67-4E6D-BC95-F3FE698E7E04&UserEmail=joh
imec.availabilityPublished - imec


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