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Hermeticity testing and failure analysis of MEMS packages

dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorJourdain, Anne
dc.contributor.authorDe Moor, Piet
dc.contributor.authorTilmans, Harrie
dc.contributor.authorMarchand, Laurent
dc.date.accessioned2021-10-16T15:39:12Z
dc.date.available2021-10-16T15:39:12Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12006
dc.sourceIIOimport
dc.titleHermeticity testing and failure analysis of MEMS packages
dc.typeProceedings paper
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorJourdain, Anne
dc.contributor.imecauthorDe Moor, Piet
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewno
dc.source.beginpage147
dc.source.endpage154
dc.source.conference14th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits - IPFA
dc.source.conferencedate11/07/2007
dc.source.conferencelocationBangalore India
imec.availabilityPublished - imec


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