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Influence of TiN microstructure on its dry etch behavior

dc.contributor.authorDictus, Dries
dc.date.accessioned2021-10-16T15:50:51Z
dc.date.available2021-10-16T15:50:51Z
dc.date.issued2007-03
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12072
dc.sourceIIOimport
dc.titleInfluence of TiN microstructure on its dry etch behavior
dc.typeMeeting abstract
dc.contributor.imecauthorDictus, Dries
dc.contributor.orcidimecDictus, Dries::0000-0002-7896-1747
dc.source.peerreviewyes
dc.source.conferenceMaterials for Advanced Metallization - MAM
dc.source.conferencedate4/03/2007
dc.source.conferencelocationBrugge Belgium
imec.availabilityPublished - imec


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