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A novel fully self-aligned SiGe:C HBT architecture featuring a single step epitaxial collector-base process
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Authors
Donkers, Johan
;
Kramer, Mark
;
Van Huylenbroeck, Stefaan
;
Choi, Li Jen
;
Meunier-Beillard, Philippe
;
Boccardi, Guillaume
;
van Noort, W.
;
Hurkx, G.A.M.
;
Vanhoucke, Tony
;
Sibaja-Hernandez, Arturo
;
Vleugels, Frank
;
Winderickx, Gillis
;
Kunnen, Eddy
;
Peeters, Stefan
;
Baute, Debbie
;
De Vos, Brecht
;
Vandeweyer, Tom
;
Loo, Roger
;
Venegas, Rafael
;
Pijper, R.
;
Decoutere, Stefaan
;
Hijzen, Erwin
Conference
Technical Digest International Electron Devices Meeting - IEDM
Title
A novel fully self-aligned SiGe:C HBT architecture featuring a single step epitaxial collector-base process
Publication type
Proceedings paper
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