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Fabrication of cantilevers and double AFM tips for the nanoprofiler

dc.contributor.authorDuriau, Edouard
dc.contributor.authorClarysse, Trudo
dc.contributor.authorHantschel, Thomas
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-16T15:58:19Z
dc.date.available2021-10-16T15:58:19Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12111
dc.sourceIIOimport
dc.titleFabrication of cantilevers and double AFM tips for the nanoprofiler
dc.typeJournal article
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.source.peerreviewno
dc.source.beginpage1162
dc.source.endpage1167
dc.source.journalMicroelectronic Engineering
dc.source.issue5_8
dc.source.volume84
imec.availabilityPublished - imec


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