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Surface micromachined platinum structures with a high thermal stability

dc.contributor.authorEkkels, Phillip
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorPuers, Bob
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-16T15:59:32Z
dc.date.available2021-10-16T15:59:32Z
dc.date.issued2007-01
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12117
dc.sourceIIOimport
dc.titleSurface micromachined platinum structures with a high thermal stability
dc.typeProceedings paper
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewyes
dc.source.beginpage325
dc.source.endpage328
dc.source.conferenceTechnical Digest 20th IEEE International Conference on Micro Electro Mechanical Systems - MEMS
dc.source.conferencedate21/01/2007
dc.source.conferencelocationKobe Japan
imec.availabilityPublished - imec


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