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Scream process for very large area MEMS structures

dc.contributor.authorErismis, Mehmet Akif
dc.contributor.authorPereira Neves, Hercules
dc.contributor.authorPuers, Bob
dc.contributor.authorVan Hoof, Chris
dc.date.accessioned2021-10-16T16:02:12Z
dc.date.available2021-10-16T16:02:12Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12130
dc.sourceIIOimport
dc.titleScream process for very large area MEMS structures
dc.typeProceedings paper
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorVan Hoof, Chris
dc.source.peerreviewno
dc.source.beginpage31
dc.source.endpage33
dc.source.conference18th Workshop on Micromachining, Micromechanics and Microsystems - MME
dc.source.conferencedate16/09/2007
dc.source.conferencelocationGuimaraes Portugal
imec.availabilityPublished - imec


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