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Optical characteristics of low-k films and barrier layers in the ultra-violet range

dc.contributor.authorEslava Fernandez, Salvador
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorFoubert, Philippe
dc.contributor.authorEymery, Guillaume
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-16T16:02:49Z
dc.date.available2021-10-16T16:02:49Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12133
dc.sourceIIOimport
dc.titleOptical characteristics of low-k films and barrier layers in the ultra-violet range
dc.typeProceedings paper
dc.contributor.imecauthorFoubert, Philippe
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.conference4th International Conference on Spectroscopic Ellipsometry - ICSE
dc.source.conferencedate11/06/2007
dc.source.conferencelocationStockholm Sweden
imec.availabilityPublished - imec


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