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Two dimensional electrical characterization of semiconductor devices under high vacuum conditions

dc.contributor.authorEyben, Pierre
dc.contributor.authorPolspoel, Wouter
dc.contributor.authorMody, Jay
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-16T16:04:16Z
dc.date.available2021-10-16T16:04:16Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12140
dc.sourceIIOimport
dc.titleTwo dimensional electrical characterization of semiconductor devices under high vacuum conditions
dc.typeMeeting abstract
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.conferenceSPM Day
dc.source.conferencedate16/11/2007
dc.source.conferencelocationLeiden The Netherlands
imec.availabilityPublished - imec


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