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Probing semiconductor technology and devices with scanning spreading resistance microscopy

dc.contributor.authorEyben, Pierre
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorAlvarez, David
dc.contributor.authorXu, Mingwei
dc.contributor.authorFouchier, Marc
dc.date.accessioned2021-10-16T16:04:28Z
dc.date.available2021-10-16T16:04:28Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12141
dc.sourceIIOimport
dc.titleProbing semiconductor technology and devices with scanning spreading resistance microscopy
dc.typeBook chapter
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.beginpage31
dc.source.bookScanning Probe Microscopy : Electrical and Electromechanical Phenomena at the Nanoscale
dc.source.endpage87
imec.availabilityPublished - imec


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