Probing semiconductor technology and devices with scanning spreading resistance microscopy

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Authors
Eyben, Pierre; Vandervorst, Wilfried; Alvarez, David; Xu, Mingwei; Fouchier, Marc
Book
Scanning Probe Microscopy : Electrical and Electromechanical Phenomena at the Nanoscale
Title
Probing semiconductor technology and devices with scanning spreading resistance microscopy
Publication type
Book chapter
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