Probing semiconductor technology and devices with scanning spreading resistance microscopy

dc.contributor.author	Eyben, Pierre
dc.contributor.author	Vandervorst, Wilfried
dc.contributor.author	Alvarez, David
dc.contributor.author	Xu, Mingwei
dc.contributor.author	Fouchier, Marc
dc.contributor.imecauthor	Eyben, Pierre
dc.contributor.imecauthor	Vandervorst, Wilfried
dc.date.accessioned	2021-10-16T16:04:28Z
dc.date.available	2021-10-16T16:04:28Z
dc.date.issued	2007
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/12141
dc.source.beginpage	31
dc.source.book	Scanning Probe Microscopy : Electrical and Electromechanical Phenomena at the Nanoscale
dc.source.endpage	87
dc.title	Probing semiconductor technology and devices with scanning spreading resistance microscopy
dc.type	Book chapter
dspace.entity.type	Publication
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