Evaluation of the junction delineation accuracy and reproducibility with the SSRM technique

Publication:

2007

Journal article

Author(s)

;

;

Janssens, Tom

;

;

;

Adachi, Kanna

;

Ishimaru, Kazunari

Microelectronic Engineering

1956 since deposited on 2021-10-16

Acq. date: 2026-05-19