Evaluation of the junction delineation accuracy and reproducibility with the SSRM technique

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Authors

Eyben, Pierre; Vanhaeren, Danielle; Janssens, Tom; Hantschel, Thomas; Vandervorst, Wilfried; Adachi, Kanna; Ishimaru, Kazunari

Issue

3

Journal

Microelectronic Engineering

Volume

84

Title

Evaluation of the junction delineation accuracy and reproducibility with the SSRM technique

Publication type

Journal article

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